J. Guo, S. K. Chee, T. Yano, and T. Higuchi, Micro-vibration stage using piezo actuators, Sensors and Actuators A: Physical, vol. WebInside the actuator system, a piezoelectric material sits between a metal plate and an actuator device. 427435, 2004. How? UNITED KINGDOM, Principles, Design, Experiments and Applications, Microelectromechanical Systems and Devices. 3, pp. The actuator mainly comprises six components: a base, a bearing, two piezoelectric stacks placed in a rhombic mechanism, two preload springs, a joint plate, and a shell. The actuator rotates well at a lower speed. This paper mainly discusses the latter. Illustration of the proposed hybrid flexure hinge EVC actuated by a parallel piezoelectric actuator. The smallest step angle is approximately 0.2 millidegrees when then applied voltage is 13 Vp-p at a frequency of 3000Hz. 200, pp. * Residents of European Union countries need to add a Book Value-Added Tax Rate based on their country of residence. When actuated the piezoelectric actuators along with y and z axial directions, the parasitic motion along the other two directions are almost the same, which are about 1.37% and 2.51% of the corresponding actuation motions. In order to investigate the stiffness of the two input displacement directions along the z-axis, the moving direction of the bottom double parallel four-bar linkage mechanism was defined as the z1 axis, the upper double parallel four-bar linkage mechanism was defined as the z2 axis. The first natural frequency along x and y axes directions are approximately the same, which are about fx=fy=2.8kHz. Driving by a sawtooth wave signal with 93. Section 3 analyzes the dynamic model and discusses simulation results. Ff drives the rotor with stick-slip motion. (a) 3D model. The motion stroke performances along three axes are shown in Figure 11(c). 3D type EVC vibrator has more degrees of freedom compared with 2D type EVC vibrator. For the patch type EVC vibrator, two sets of piezoelectric plates are attached to the outer wall of the resonant rod to achieve the same or different modes of resonance. 2. 11, pp. The double parallel four-bar linkage mechanism is connected in series with the right circular flexure hinges. It has been validated that EVC can improve the machinability of difficult-to-cut materials [2, 3, 4]. (d) Frequency response. Our team is growing all the time, so were always on the lookout for smart people who want to help us reshape the world of scientific publishing. (e) Results of the resolution test. Open Access is an initiative that aims to make scientific research freely available to all. (a) 3D model of the compliant mechanism. Semantic Scholar is a free, AI-powered research tool for scientific literature, based at the Allen Institute for AI. If you need an account, pleaseregister here, This paper proposes a piezoelectric actuator based on the parasitic motion principle which overcomes the disadvantage that piezoelectric actuators designed by the parasitic motion principle always sacrifice reverse directional performance for improving forward directional performance. According to the principle of EVC, generally, there are two piezoelectric actuator configurations for the simplest: one is there existing an angle between two piezoelectric actuators, the other one is piezoelectric actuator parallel configuration. Section 2 clarifies the configuration and working principle of the actuator. High keeping suspension. The rotary spatial vibration-assisted diamond cutting system consists of a tool holder, compliant spatial vibrator, piezoelectric actuator, compliant spatial vibrator holder, connection shaft, and fixture. Y. Liu, X. Yang, W. Chen, and D. Xu, A bonded-type piezoelectric actuator using the first and second bending vibration modes, IEEE Transactions on Industrial Electronics, vol. (c) Two types of flexure hinge. Piezo crystals can change their structure in just a few thousandths of a second when electrically charged by expanding slightly. PIEZOELECTRIC ACTUATOR is a machine that uses the polarisation of piezoelectric materials to develop a voltage and convert this electric voltage into Taking advantage of high resolution, rapid response, and compact structure, piezoelectric actuators are widely employed for achieving precision positioning in both scientific research and industrial application. Publishing on IntechOpen allows authors to earn citations and find new collaborators, meaning more people see your work not only from your own field of study, but from other related fields too. In general, the mechanical structure decoupling design is usually adopted. Contact our London head office or media team here. The comparison between designed and measured cutting tool locus are shown in Figure 7(f) for both low-frequency (200Hz) and high-frequency (5.5kHz). An NSGA-II algorithm was used to perform the optimization process. Direct-drive actuators have a high positioning resolution and compact structure but limited stroke [79]. Finally, a summary is concluded and the future development perspectives of these non-resonant type piezoelectric actuators are discussed. The duty cycle of the sawtooth wave is much lower than 90%, in contrast with the value of 100% symmetry under ideal conditions, resulting in a smaller displacement of slip motion. The sweep experiments were conducted by setting the input voltage amplitudes to 5V and the frequency from 0 to 10kHz linearly. However, in a same period, there are more steps contributing to the total displacement. Moreover, preload springs of different size can be used to adjust the preload force acting between the friction block and rotary bearing. The lowest voltage that produces stable rotation is approximately 13 Vp-p. According to the analysis above, a prototype was fabricated. A dynamic model of the rotary piezoelectric actuator was established to simulate how the input driving voltage affects the stick-slip motion of the actuator. Output displacement under different frequencies of a 93V sawtooth waveform. In addition, when the material and pressure of the two contact friction surfaces are determined, we assume that the friction force is also determined, and the effect of the friction force on the performance of the actuator is thus weak. S. Shao, S. Song, N. Chen, and M. Xu, Structure and control strategy for a piezoelectric inchworm actuator equipped with MEMS ridges, Sensors and Actuators A: Physical, vol. There are no steady errors. These two figures demonstrate the double-frequency EVC tracking ability. 6, no. London, SW7 2QJ, 2 Working principle The rotary actuator consists of a rotator, two pieces of piezoelectric bimorph, two substrates and two masses as is shown in Fig. Additionally, the developed EVC vibrator has a good tracking performance and very low crosstalk between the motion axes. In this work, a complete compliance modeling was established based on the matrix-based compliance modeling method for compliant spatial vibrator. T. Cheng, M. He, H. Li, X. Lu, H. Zhao, and H. Gao, A novel trapezoid-type stick-slip piezoelectric linear actuator using right circular flexure hinge mechanism, IEEE Transactions on Industrial Electronics, vol. Illustration of mechanical structure, experimental setup, and testing results. Direct-push type piezoelectric actuators could achieve really high resolution, but the working stroke is quite small which is generally limited to several or tens of micrometers [16, 17]. The maximum displacements along x1 and x2 axes are not the same which are 22m and 24m, respectively, due to the manufacturing error. An, J. W. Li, and W. J. Zhang, Piezoelectric friction-inertia actuator-a critical review and future perspective, The International Journal of Advanced Manufacturing Technology, vol. When the frequency of the applied voltage is lower than 1600Hz, the angular velocities of the one piezoelectric actuator and two-piezoelectric actuator are similar in that both velocities increase with frequency with good linearity. WebThe working principle of the proposed actuator is similar to the opening and closing actions of the three-petal mouth of a rabbit, which is analyzed by the finite element To date our community has made over 100 million downloads. In this study, a planar ultrasonic motor platform is presented that uses three half-side excited piezoelectric hemispherical shell resonators. 26, 2017. Prototype of the proposed piezoelectric rotary actuator. The dimensions of the bearing are 25mm37mm7mm. the voltage is applied to piezoelectric actuators then they generate a small displacement through a high force capacity, so these are used in many applications like ultra-precise positioning, in high forces handling & generation in stationary or dynamic c 62, no. (f) the synthesized cutting tool locus and the projections [15]. Figure 7(b) shows the FEA results of modal analysis. After the stick phase, the rotor produced an angle displacement , and then the rotor rotates backwards through displacement during the slip phase. Simulation results of rotation displacement of the PA under 500Hz sawtooth waveform at different amplitudes. 699705, 2010. The maximum following error is about 12nm, which is less than 4% of the full span. The results are shown in Figure 10(c), the strokes along x, y and z axial directions are respectively 12.37m, 13.14m and 11.72m. This design is not unique, of course. Shamoto and Moriwaki applied the vertical piezoelectric actuator configuration to Contact our London head office or media team here. 4050, 2017. The mechanical structure has mirror symmetry about the y-axis. It can be seen that the first natural frequency is about 1800Hz. K. Uchino, Phase Transitions, vol. Coupling tests of the two motion axes were performed by using sinusoidal signals with frequency of 200Hz and amplitude of 120V. The results are shown in Figure 7(e) that the coupling ratios between two motion axes are within 5%. To investigate how the step displacement and speed of the actuator are affected by the parameters of the proposed dynamic model, such as and , we built a Simulink model in MATLAB software and conducted simulations. (b) Influence of decoupling angle on the elliptical parameters and relative ratio. In the stick phase, the voltage rises slowly, the rotor part and PE part move together, and the two drawn displacement lines overlap each other. To evaluate the performance of actuators at different frequencies of the driving voltage, we applied a sawtooth wave signal having a voltage of 93V and 100% or 0% symmetry on the piezoelectric stack. (a) 3D model of the developed EVC vibrator. As is known, the flexure-based non-resonant type EVC vibrator has more flexibility and modulation ability compared with the resonant type EVC vibrator and it has been widely concentrated in recent years. 3, pp. WebPiezo actuator The same materials undergo dimensional change under the influence of an electric field. It can be seen that the developed 2D pseudo-decouple compliant mechanism generated an approximately perfect ellipse locus when the decoupling angle was set to be 102.5. The maximum displacement is 7.1m, which is a loss of 1.9m compared to the unconstrained displacement. 10291034, 2012. Figure 1 depicts the configuration of the proposed rotary piezoelectric actuator. However, the tool modulation capability mainly depends on the performance of the vibrator. Constraints: Lc/L<5%, max Hotels In Fishtown, Philadelphia, Dechlorinate Pool Water, White Hydrangeas Near Me, Geoffroy-guichard Stadium, Articles P